器件图片：

示意图：

SEM：

DESCRIPTION QUESTIONS AND ANSWERS：

GFAB - Graphene Foundry Services

Suited for application development, pilot production and commercialisation, our GFAB services takes advantage of all the process flows within our Foundry, allowing the manufacture of many device architectures and enabling a myriad of technologies to become a reality.Fully customise the design to tailor the device size to your needs, choose the right material configuration & geometry for your application and define your die footprint: we will get it done.

General purpose:

· Au (50 nm) contacts

· Optional: Ti, Ni, Al.

· Graphene patterning

Download the Guidelines and Design Rules

PROCESS FLOW 2

Liquids & Bio:

· Au (50 nm) contacts

· Graphene patterning

· Optional: Ti, Ni, Al.

· Optional: Al2O3 encapsulation (50 nm)

· Optional: polymeric encapsulation (200 nm)

· Optional: Via opening

Download the Guidelines and Design Rules

PROCESS FLOW 3 - HKMG

· High-K Metal Gate

· Gold (50 nm) contacts

· Graphene patterning

· Optional: Back gate (down to EOT = 5 nm)

· Optional: Top gate (down to EOT = 20 nm)